Multi-cusp ion source for Gen 5.5 doping system
Year: 2012
Type: conference-paper
Source: AIP conference proceedings
DOI: 10.1063/1.4766555
Authors: Yutaka Inouchi, Takeshi Matsumoto, Shojiro Dohi, Masahiro Tanii, Genki Takahashi, Katsuharu Imai, Ippei Nishimura, Junichi Tatemichi, Masashi Konishi, Masao Naito
Institution: Nissin Ion Equipment Co., Ltd. (Japan)
Language: English
Subfield: Nuclear and High Energy Physics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2010633924