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Genki Takahashi
Institution:
Nissin Ion Equipment Co., Ltd. (Japan)
Observed institution:
Nissin Ion Equipment Co., Ltd. (Japan)
OpenAlex ID:
A5035212013
Multi-cusp ion source for Gen 5.5 doping system
2012
·
Yutaka Inouchi
, Takeshi Matsumoto
, et al.
·
AIP conference proceedings
·
5
NISSIN iG5 implantation tool for generation 5.5 in the flat panel display industry
2012
·
Takeshi Matsumoto
, Katsuharu Imai
, et al.
·
AIP conference proceedings
·
5
Ion doping system iG8 for generation 8 flat-panel display industry
2025
·
Kazuki Kawase
, Yasushi Ota
, et al.
·
MRS Advances
·
1
Neutralization of Electrical Static Charge under High Vacuum by Plasma Flood Gun
2018
·
Tomokazu Nagao
, Genki Takahashi
, et al.
·
International Conference on Ion Implantation Technology
·
1
Development of Plasma Flood Gun for Gen 5.5 Implanter
2016
·
Tomokazu Nagao
, Taro Hayakawa
, et al.
·
International Conference on Ion Implantation Technology
·
1
Multi-cusp ion source for doping process of flat panel display manufacturing
2014
·
Yutaka Inouchi
, Takeshi Matsumoto
, et al.
·
Review of Scientific Instruments
·
1
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Works count:
6
Citation count:
14
H-index:
2
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