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Z. Tokeil

Institution: IMEC
Observed institution: IMEC
OpenAlex ID: A5010900318
45nm nMOSFET with metal gate on thin SiON driving 1150μA/μm and off-state of 10nA/μ
2005 · K. Henson, R.J.P. Lander, et al. · Technical digest - International Electron Devices Meeting/Technical digest · 12
Novel selective sidewall airgap process [single damascene interconnects]
2005 · J.P.G. de Mussy, C. Bruynsereade, et al. · IEEE International Interconnect Technology Conference (IITC) · 3
Works count: 2
Citation count: 15
H-index: 2
I10-index: 1
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