45nm nMOSFET with metal gate on thin SiON driving 1150μA/μm and off-state of 10nA/μ
Year: 2005
Type: conference-paper
Institutions: IMEC, Philips (Belgium), Philips (Netherlands)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: European Commission
OpenAlex ID: W1590468063