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Stephan Beckx

Observed name: S. Beckx
Institution: IMEC
OpenAlex ID: A5083115989
Low-Loss SOI Photonic Wires and Ring Resonators Fabricated With Deep UV Lithography
2004 · P. Dumon, W. Bogaerts, et al. · IEEE Photonics Technology Letters · 441
Compact Wavelength-Selective Functions in Silicon-on-Insulator Photonic Wires
2006 · Wim Bogaerts, Pieter Dumon, et al. · IEEE Journal of Selected Topics in Quantum Electronics · 337
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Fabrication of photonic crystals in silicon-on-insulator using 248-nm deep UV lithography
2002 · W. Bogaerts, V. Wiaux, et al. · IEEE Journal of Selected Topics in Quantum Electronics · 166
Ultralow-loss 3-dB photonic crystal waveguide splitter
2004 · L. H. Frandsen, P. I. Borel, et al. · Optics Letters · 126
Highly manufacturable FinFETs with sub-10nm fin width and high aspect ratio fabricated with immersion lithography
2007 · M.J.H. van Dal, N. Collaert, et al. · Symposium on VLSI Technology · 81
Linear and Nonlinear Nanophotonic Devices Based on Silicon-on-Insulator Wire Waveguides
2006 · Pieter Dumon, Gino Priem, et al. · Japanese Journal of Applied Physics · 76
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Evaluation of Megasonic Cleaning for Sub-90nm Technologies
2005 · Guy Vereecke, Frank Holsteyns, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 49
Gatestacks for scalable high-performance FinFETs
2007 · G. Vellianitis, J. Petry, et al. · Technical digest - International Electron Devices Meeting/Technical digest · 34
SOI nanophotonic waveguide structures fabricated with deep UV lithography
2004 · W. Bogaerts, P. Dumon, et al. · Photonics and Nanostructures - Fundamentals and Applications · 32
Diffusion of solvents in thin porous films
2006 · D. Shamiryan, M.R. Baklanov, et al. · Colloids and Surfaces A Physicochemical and Engineering Aspects · 29
A compact photonic horizontal spot-size converter realized in silicon-on-insulator
2004 · B. Luyssaert, P. Vandersteegen, et al. · IEEE Photonics Technology Letters · 26
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Large-scale production techniques for photonic nanostructures
2003 · Wim Bogaerts, Vincent Wiaux, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 25
CMP-less integration of fully Ni-silicided metal gates in FinFETs by simultaneous silicidation of the source, drain, and the gate using a novel dual hard mask approach
2005 · K.G. Anil, P. Verheyen, et al. · Symposium on VLSI Technology · 23
Silicon-on-insulator nanophotonics
2005 · Wim Bogaerts, Pieter Dumon, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 21
Wavelength-selective components in SOI photonic wires fabricated with deep UV lithography
2005 · P. Dumon, W. Bogaerts, et al. · International Workshop on Computational Electronics · 17
Silicon-on-insulator platform for integrated wavelength-selective components
2005 · D. Taillaert, R. Baets, et al. · IEEE/LEOS Workshop on Fibres and Optical Passive Components (WFOPC) · 14
Experimental Demonstration of High Coupling Efficiency Between Wide Ridge Waveguides and Single-Mode Photonic Crystal Waveguides
2004 · P. Sanchis, J. Garcia, et al. · IEEE Photonics Technology Letters · 14
Silicon nanophotonic wire structures fabricated by 193nm optical lithography
2007 · Shankar Kumar Selvaraja, Patrick Jaenen, et al. · IEEE Lasers and Electro-Optics Society Annual Meeting (LEOS) · 13
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Implementation of high-k and metal gate materials for the 45nm node and beyond: gate patterning development
2005 · S. Beckx, M. Demand, et al. · Microelectronics Reliability · 13
Integration of tall triple-gate devices with inserted-Ta/sub x/N/sub y/ gate in a 0.274μm/sup 2/ 6t-sram cell and advanced CMOS logic circuits
2005 · L. Witters, N. Collaert, et al. · Symposium on VLSI Technology · 12
45nm nMOSFET with metal gate on thin SiON driving 1150μA/μm and off-state of 10nA/μ
2005 · K. Henson, R.J.P. Lander, et al. · Technical digest - International Electron Devices Meeting/Technical digest · 12
Integration challenges for multi-gate devices
2005 · N. Collaert, S. Brus, et al. · IEEE International Conference on IC Design and Technology (ICICDT) · 11
Profile control of novel non-Si gates using BCl3∕N2 plasma
2007 · Denis Shamiryan, Vasile Paraschiv, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 10
A scalable Stacked Gate NOR/NAND Flash Technology compatible with high-k and metal gates for sub 45nm generations
2006 · J. de Vos, L. Haspeslagh, et al. · IEEE International Conference on IC Design and Technology (ICICDT) · 10
A Novel SONOS Memory with HfSiON/Si3N4/HfSiON Stack for Improved Retention
2006 · R. van Schaijk, M. van Duuren, et al. · IEEE International Memory Workshop (IMW) · 9
Works count: 55
Citation count: 1,664
H-index: 15
I10-index: 24
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