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Integration challenges for multi-gate devices

Year: 2005
Type: conference-paper
DOI: 10.1109/icicdt.2005.1502627
Authors: N. Collaert, S. Brus, A. De Keersgieter, A. Dixit, I. Ferain, M. Goodwin, A. Kottantharayil, R. Rooyackers, P. Verheyen, Y. Yim, P. Zimmerman, S. Beckx, B. Degroote, M. Demand, M. Kim, E. Kunnen, S. Locorotondo, G. Mannaert, F. Neuilly, D. Shamiryan, C. Baerts, M. Ercken, D. Laidlcr, F. Leys, R. Loo, J. Lisoni, J. Snow, R. Vos, W. Boullart, I. Pollentier, S. De Gendt, K. De Meyer, M. Jurczak, S. Biescmans
Institutions: IMEC, KU Leuven, Texas Instruments (United States), Samsung (South Korea), Samsung Electronics (South Korea), Intel (United States), Philips (Belgium)
Language: English
Open Access status: closed
OpenAlex ID: W2148507208
FWCI: 2.814
Cites: 22
Cited by: 11
Related to: 10