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James Snow
Observed name:
J. Snow
Institution:
IMEC
Observed institution:
IMEC
OpenAlex ID:
A5111905337
CMP-less integration of fully Ni-silicided metal gates in FinFETs by simultaneous silicidation of the source, drain, and the gate using a novel dual hard mask approach
2005
·
K.G. Anil
, P. Verheyen
, et al.
·
Symposium on VLSI Technology
·
23
Demonstration of recessed SiGe S/D and inserted metal gate on HfO/sub 2/ for high performance pFETs.
2006
·
P. Verheyen
, G. Eneman
, et al.
·
Technical digest - International Electron Devices Meeting/Technical digest
·
21
Integration challenges for multi-gate devices
2005
·
N. Collaert
, S. Brus
, et al.
·
IEEE International Conference on IC Design and Technology (ICICDT)
·
11
Roadblocks and Critical Aspects of Cleaning for Sub-65nm Technologies
2006
·
Paul Mertens
, G. Vereecke
, et al.
·
IEEE International Power Modulator Symposium and High-Voltage Workshop (IPMHVC)
·
4
Germanium Deep-Submicron p-FET and n-FET Devices, Fabricated on Germanium-On-Insulator Substrates
2007
·
M. Meuris
, B. Jaeger
, et al.
·
Springer eBooks
·
2
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Works count:
5
Citation count:
61
H-index:
4
I10-index:
3
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