Author

Matthias Cumme

Observed name: M. Cumme

Observed institutions: Carl Zeiss (Germany), Jenoptik (Germany), Friedrich Schiller University Jena

OpenAlex ID: A5017232007

From regular periodic micro-lens arrays to randomized continuous phase profiles

2015 · Matthias Cumme, Arnaud Deparnay · Advanced Optical Technologies · 16

Fabrication and properties of refractive micro-optical beam-shaping elements

1999 · Ernst-Bernhard Kley, Lars-Christian Wittig, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 12

Active and passive components of 3D integrated optics

2000 · Christoph A. Waechter, Th. Bauer, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 8

Adapting existing e-beam writers to write HEBS-glass gray-scale masks

1999 · Ernst-Bernhard Kley, Matthias Cumme, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 8

Beam-shaping elements for holographic applications

2000 · Ernst-Bernhard Kley, Matthias Cumme, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 6

Resist hardening without surface deviation

2003 · Holger Hartung, Matthias Cumme, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2

Large-area gratings fabricated by ultrafast e-beam writing

2000 · Ernst-Bernhard Kley, T. Clausnitzer, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2

Fabrication and properties of refractive micro-optical profiles for lenses, lens arrays, and beam-shaping elements

2000 · Ernst-Bernhard Kley, Matthias Cumme, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2

Fabrication and qualification of roughness reference samples for industrial testing of surface roughness levels below 0.5 nm Sq

2015 · O. Faehnle, E. Langenbach, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1

Grayscale homogenizers in calcium fluoride

2008 · Jeffrey Lawrence, Lamarr Simmons, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1

Challenging micro-optical applications demand diverse manufacturing solutions

2007 · Gregg Borek, Peter Weissbrodt, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1

Refractive beam shaping elements

2002 · L.C. Wittig, M. Cumme, et al. · Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) · 1

Thick refractive beam shaping elements applied to laser diodes

2001 · Matthias Cumme, Holger Hartung, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1

Intermittence effect in electron beam writing

2001 · L.-Chr. Wittig, M. Cumme, et al. · Microelectronic Engineering · 1

Micro-optics

2017 · Hans Peter Herzig, Ernst-Bernhard Kley, et al.

Microstructured Optics for Excimer-based Systems: Applications for Imaging, Beam Shaping and Coherence Management

2010 · Robert Brunner, Hans Jürgen Dobschal, et al. · International Optical Design Conference

Combined elements for beam shaping and polarization management

2005 · Matthias Cumme, Peter Triebel, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Hot spot free diffractive DUV-homogenizer for high NA-illumination

2005 · Matthias Cumme, Mirko Riethmuller, et al. · Optical Microlithography XVIII

Improved resist treatment for gray tone lithographic beam shaping element fabrication

2005 · H. Hartung, M. Cumme, et al. · Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)

Analog proximity-photolithography with mask aligners for the manufacturing of micro-optical elements

2003 · Tobias Erdmann, Matthias Cumme, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Beam shaping for multimode beams

2001 · Lars-Christian Wittig, Matthias Cumme, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Sub-micrometer structuring of metals with femtosecond laser pulses

2001 · S. Nolte, M. Will, et al. · Conference on Lasers and Electro-Optics

Works count: 22

Citation count: 62

H-index: 5

I10-index: 2