Intermittence effect in electron beam writing
Year: 2001
Type: article
Source: Microelectronic Engineering
Authors: L.-Chr. Wittig, M. Cumme, T. Harzendorf, E.-B. Kley
Institution: Friedrich Schiller University Jena
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2014912903