Author

Mathias Tomandl

Observed names: M. Tomandl, Tomandl, Mathias

Institution: IMS Nanofabrication (Austria)

Observed institutions: University of Vienna, Vienna Center for Quantum Science and Technology, IMS Nanofabrication (Austria)

OpenAlex ID: A5018700533

Quantum interference of large organic molecules

2011 · Stefan Gerlich, Sandra Eibenberger, et al. · Nature Communications · 396

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Realization of optical carpets in the Talbot and Talbot-Lau configurations

2009 · William B. Case, Mathias Tomandl, et al. · Optics Express · 143

Simulated Interactive Research Experiments as Educational Tools for Advanced Science

2015 · Mathias Tomandl, Thomas Mieling, et al. · Scientific Reports · 14

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Multi-beam mask writing opens up new fields of application, including curvilinear mask pattern for high numerical aperture extreme ultraviolet lithography

2024 · Mathias Tomandl, Christoph Spengler, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 13

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Multi-beam mask writing opens up new fields of application

2023 · Mathias Tomandl, Christoph Spengler, et al. · European Mask and Lithography Conference (EMLC) · 7

Improvement of mask pattern placement error using novel resist charging control methodology in multi-beam mask writer

2024 · Hyoyeon Kim, Hyungrae Noh, et al. · Photomask and next-generation lithography mask technology. Conference · 3

Realisierung von optischen Talbot- und Talbot-Lau-Teppichen

2010 · Tomandl, Mathias · University of Vienna · 2

MBMW-100 flex, the 1st electron multi-beam mask writer for mature and advanced mask nodes

2023 · Mathias Tomandl, Christof Klein, et al. · SPIE Photomask Technology Conference · 1

New multi-beam mask data preparation method for EUV high volume data

2023 · Kyungsup Shin, Sunyoung Kim, et al. · Photomask and next-generation lithography mask technology. Conference · 1

Multi-beam patterning technology and mask making beyond 5nm

2023 · Bassam Shamoun, Zachary Alberti, et al. · SPIE Novel Patterning Technologies · 1

Matter wave interferometry: Exploring the importance of the internal molecular properties

2011 · Sandra Eibenberger, Stefan Gerlich, et al. · Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)

Matter wave interferometry with large and complex molecules

2011 · Stefan Gerlich, Sandra Eibenberger, et al. · Bulletin of the American Physical Society

Works count: 12

Citation count: 581

H-index: 5

I10-index: 4