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Alexander P. Palov

Observed names: A P Palov, A. P. Palov, A. Palov, A.P. Palov, AP Palov, Alexander A. P. Palov, Alexander P Palov, Alexander Palov, Alexander Petrovich Palov, Alexandre Palov, Palov A. P., Palov, Alexander P., А.П. Палов, Палов Александр Петрович
Observed institutions: North China University of Technology, Lomonosov Moscow State University, University of Bristol, Plasma (Russia), Mitsubishi Electric (Japan), Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, National Research Nuclear University MEPhI
ORCID: 0000-0002-7151-2893
Observed ORCID: 0000-0002-7151-2893
OpenAlex ID: A5019723656
Interaction of F atoms with SiOCH ultra low-k films. Part II: etching
2015 · T V Rakhimova, D V Lopaev, et al. · Journal of Physics D Applied Physics · 31
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Theory of Molecular Collisions
2015 · Gabriel G Balint-Kurti, Alexander Palov · Royal Society of Chemistry eBooks · 27
Multi-step reaction mechanism for F atom interactions with organosilicate glass and SiO x films
2016 · Yuri A Mankelevich, Ekaterina N Voronina, et al. · Journal of Physics D Applied Physics · 25
Effect of porosity and pore size on dielectric constant of organosilicate based low-k films: An analytical approach
2016 · Alexander P. Palov, Ekaterina N. Voronina, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 23
Dependence of dielectric constant of SiOCH low-k films on porosity and pore size
2015 · Alexander Palov, Tatiana V. Rakhimova, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 20
Monte Carlo Simulation of 1 eV–35 keV Electron Scattering in Teflon
1998 · Alexandre Palov, Haruhisa Fujii, et al. · Japanese Journal of Applied Physics · 19
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Crystalline silicon solar cells with laser ablated penetrating V‐grooves: Modeling and experiment
2012 · Gennady Untila, Alexander Palov, et al. · physica status solidi (a) · 16
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Fluorine atoms interaction with the nanoporous materials: experiment and DFT simulation
2017 · Yuri A. Mankelevich, Ekaterina N. Voronina, et al. · The European Physical Journal D · 15
VPA: Computer program for the computation of the phase shift in atom–atom potential scattering using the Variable Phase Approach
2021 · A.P. Palov, G.G. Balint-Kurti · Computer Physics Communications · 13
Modelling degradation of PTFE under electron irradiation
2012 · A. Palov, H. Fujii, et al. · Polymer Degradation and Stability · 13
Charging of submicron structures during silicon dioxide etching in one- and two-frequency gas discharges
2010 · A. P. Palov, Yu. A. Mankelevich, et al. · Plasma Physics Reports · 13
Non‐self‐sustained electron beam RF‐generated plasma in application for functional surface pretreatment
2021 · Alexander P. Palov, Olga V. Proshina, et al. · Plasma Processes and Polymers · 12
Reaction of hydrogen atoms with singlet delta oxygen (O 2 ( a 1 Δ g )). Is everything completely clear?
2016 · A A Chukalovsky, K S Klopovsky, et al. · Journal of Physics D Applied Physics · 12
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Sputtering of Si by Ar: A binary collision approach based on quantum-mechanical cross sections
2018 · Alexander P. Palov, Gabriel G. Balint-Kurti, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 9
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Modification of Porous Ultralow-k Film by Vacuum Ultraviolet Emission
2022 · Alexey I. Zotovich, Sergey M. Zyryanov, et al. · ACS Applied Electronic Materials · 7
Hafnium oxide layer-enhanced single-walled carbon nanotube field-effect transistor-based sensing platform
2020 · QingYi Meng, Shuhua Wei, et al. · Analytica Chimica Acta · 7
Experimental and DFT study of nitrogen atoms interactions with SiOCH low-κ films
2017 · Ekaterina N. Voronina, Yuri A. Mankelevich, et al. · The European Physical Journal D · 7
Charging and the secondary electron–electron emission on a trench surface: broadening and shift of ion energy spectrum at plasma trench etching
2010 · A P Palov, Yu A Mankelevich, et al. · Journal of Physics D Applied Physics · 7
Modeling of the SiO Circumstellar Maser: Rate Coefficients for the Vibrationally‐Rotationally Inelastic Scattering of H+SiO
2006 · A. P. Palov, M. D. Gray, et al. · The Astrophysical Journal · 7
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Vibrationally-rotationally inelastic cross sections for H+SiO collisions
2002 · Alexander P. Palov, Pedro Jimeno, et al. · The Journal of Chemical Physics · 7
Electron transport simulation for the ion-electron emission problem
1993 · AP Palov, VV Pletnev, et al. · Vacuum · 6
Properties of organosilicate low- k films with 1,3- and 1,3,5-benzene bridges between Si atoms
2020 · Chunhui Liu, Chunguang Lv, et al. · Japanese Journal of Applied Physics · 5
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Analysis of the Results of Silicon Sputtering Simulation as Functions of Different Ar–Si Potentials
2019 · A. A. Sycheva, E. N. Voronina, et al. · Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques · 5
Helium electron beam rf plasma for low-k surface functionalization
2022 · Ekaterina N. Voronina, Anastasia A. Sycheva, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 4
Dependence of dielectric constant of hydrocarbon bridged low-k films on porosity
2019 · Alexander P. Palov, Mikhail R. Baklanov, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 4
Works count: 58
Citation count: 344
H-index: 12
I10-index: 13
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