Modification of Porous Ultralow-k Film by Vacuum Ultraviolet Emission
Year: 2022
Type: article
Source: ACS Applied Electronic Materials
Authors: Alexey I. Zotovich, Sergey M. Zyryanov, Dmitry V. Lopaev, Askar A. Rezvanov, Ahmed G. Attallah, Maciej O. Liedke, Maik Butterling, Maria A. Bogdanova, Alexey S. Vishnevskiy, Dmitry S. Seregin, Dmitry A. Vorotyntsev, Alexander P. Palov, Eric Hirschmann, Andreas Wagner, Sergej Naumov, Konstantin A. Vorotilov, Tatyana V. Rakhimova, Alexander T. Rakhimov, Mikhail R. Baklanov
Institutions: Lomonosov Moscow State University, Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Research Institute of Molecular Electronics, Helmholtz-Zentrum Dresden-Rossendorf, Minia University, MIREA - Russian Technological University, Leibniz Institute of Surface Engineering, European Centre for Knowledge and Technology Transfer
Language: English
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
Awards: G1942489586, G2826565104, G4859371483
OpenAlex ID: W4293076754