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Stephen T. Palmacci

Observed names: S. Palmacci, S. T. Palmacci, Stephen Palmacci
OpenAlex ID: A5035787652
Lithography with 157 nm lasers
1997 · T. M. Bloomstein, M. W. Horn, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 107
Biodistribution of an ultrasmall superparamagnetic iron oxide colloid, BMS 180549, by different routes of administration
1994 · Howard H. Bengele, Stephen Palmacci, et al. · Magnetic Resonance Imaging · 84
All silicon infrared photodiodes: photo response and effects of processing temperature
2007 · M. W. Geis, S. J. Spector, et al. · Optics Express · 73
Critical issues in 157 nm lithography
1998 · T. M. Bloomstein, M. Rothschild, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 66
Noncontact detection of homemade explosive constituents via photodissociation followed by laser-induced fluorescence
2010 · C. M. Wynn, S. Palmacci, et al. · Optics Express · 59
Liquid immersion lithography: Why, how, and when?
2004 · M. Rothschild, T. M. Bloomstein, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 53
Detection of condensed-phase explosives via laser-induced vaporization, photodissociation, and resonant excitation
2008 · C. M. Wynn, S. Palmacci, et al. · Applied Optics · 41
Noncontact optical detection of explosive particles via photodissociation followed by laser-induced fluorescence
2011 · C. M. Wynn, S. Palmacci, et al. · Optics Express · 36
Laser Micromachining of Silicon: a New Technique for Fabricating High Quality Terahertz Waveguide Components'
1997 · C. K. Walker, Gopal Narayanan, et al. · Softwaretechnik-Trends · 34
Experimental demonstration of remote optical detection of trace explosives
2008 · C. M. Wynn, S. Palmacci, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 22
Dynamic photoacoustic spectroscopy for trace gas detection
2012 · C. M. Wynn, S. Palmacci, et al. · Applied Physics Letters · 14
Prospects for photolithography at 121 nm
2002 · V. Liberman, M. Rothschild, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 14
High-sensitivity detection of trace gases using dynamic photoacoustic spectroscopy
2013 · Charles M. Wynn, Stephen T. Palmacci, et al. · Optical Engineering · 12
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Contoured Elastic-Membrane Microvalves for Microfluidic Network Integration
1999 · A. M. Young, T. M. Bloomstein, et al. · Journal of Biomechanical Engineering · 12
Laser durability studies of high index immersion fluids: fluid degradation and optics contamination effects
2007 · V. Liberman, M. Rothschild, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 8
Controlled contamination studies in 193-nm immersion lithography
2005 · V. Liberman, S. T. Palmacci, et al. · Optical Microlithography XVIII · 8
Laser micromachining of silicon: a new technique for fabricating terahertz imaging arrays
1998 · Christopher K. Walker, Aimee L. Hungerford, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 8
Marathon evaluation of optical materials for 157-nm lithography
2001 · Vladimir Liberman, Mordechai Rothschild, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 7
High-index immersion lithography: preventing lens photocontamination and identifying optical behavior of LuAG
2008 · V. Liberman, M. Rothschild, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 6
Impact of photoacid generator leaching on optics photocontamination in 193-nm immersion lithography
2007 · Vladimir Liberman, Mordechai Rothschild, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 6
UV cleaning of contaminated 157-nm reticles
2001 · Theodore M. Bloomstein, Vladimir Liberman, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 6
Three-dimensional laser direct writing: Applications to multichip modules
1994 · N. Nassuphis, R. H. Mathews, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 6
Development and evaluation of 193nm immersion generation-three fluid candidates
2008 · Paul A. Zimmerman, Jeffrey Byers, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 5
Contamination rates of optical surfaces at 157 nm in the presence of hydrocarbon impurities
2002 · Theodore M. Bloomstein, Vladimir Liberman, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 5
Controlled contamination of optics under 157-nm laser irradiation
2001 · Theodore M. Bloomstein, Vladimir Liberman, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 5
Works count: 40
Citation count: 723
H-index: 12
I10-index: 14
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