Contamination rates of optical surfaces at 157 nm in the presence of hydrocarbon impurities
Year: 2002
Type: conference-paper
DOI: 10.1117/12.474620
Authors: Theodore M. Bloomstein, Vladimir Liberman, Mordechai Rothschild, Stephen T. Palmacci, D. E. Hardy, Jan H. C. Sedlacek
Institution: MIT Lincoln Laboratory
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1980375423