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Nikolai A. Andrianov

Observed names: Andrianov Nikolai, Andrianov, Nikolai, N. A. Andrianov, Nikolai Andrianov
ORCID: 0000-0002-6113-880X
Observed ORCID: 0000-0002-6113-880X
OpenAlex ID: A5042015038
Enhanced silicon nitride etching in the presence of F atoms: Quantum chemistry simulation
2018 · Yuri V. Barsukov, Vladimir Volynets, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 18
Highly Selective Plasma Etching Technique for Molybdenum
2023 · Artem A. Osipov, Nikolai A. Andrianov, et al. · Plasma Chemistry and Plasma Processing · 9
Acoustofluidic Particle Trapping in a Structured Microchannel Using Lateral Transducer Modes
2024 · Andreas Fuchsluger, Annalisa De Pastina, et al. · IEEE Sensors Journal · 7
Large Built‐in Fields and Tunable Ferroelectricity in Composition‐Graded ScAlN Thin Films Deposited by Reactive Sputtering
2025 · Tai Nguyen, Anirban Ghosh, et al. · Advanced Science · 5
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Mechanism of selective SiO2/photoresist reactive ion etching in an inductively coupled plasma operated in a C4F8/H2 gas mixture
2025 · Iurii Nesterenko, Benjamin Kalas, et al. · Applied Physics Letters · 5
Ultraviolet to mid-infrared optical properties of sputtered Al(Sc)N-on-SiO2 thin films and experimental demonstration of AlN integrated photonic devices in the telecom C-band
2024 · Jasmin Spettel, Nikolai Andrianov, et al. · Optics Express · 5
Utilizing Lateral Plate Transducer Modes for High Quality Acoustofluidics in Silicon-Based Chips
2022 · Andreas Fuchsluger, Annalisa De Pastina, et al. · Proceedings of IEEE Sensors/Proceedings of IEEE Sensors ... · 5
Engineering mode coupling in a hybrid plasmon-photonic cavity for dual-band infrared spectroscopic gas sensing
2021 · Thang Duy Dao, Florian Dubois, et al. · OSA Continuum · 3
Concept and Proof of Principle of an Acoustofluidic Single-Particle Sorting Device Using a Spatially Confined Acoustic Active Region
2024 · Andreas Fuchsluger, Annalisa De Pastina, et al. · EUROSENSORS Conference (EUROSENSORS) · 2
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Surface modification by chlorine-chemistry during atomic layer etching of aluminum nitride: A first principles-based analysis
2026 · Sanjay Nayak, Nikolai Andrianov, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1
Acoustofluidic Trapping in Structured Microchannels Using Lateral Transducer Modes
2023 · Andreas Fuchsluger, Annalisa De Pastina, et al. · Proceedings of IEEE Sensors/Proceedings of IEEE Sensors ... · 1
Dual-frequency piezoelectric MEMS microphones based on AlSc 30% N thin films for aeroacoustic measurements
2023 · Lixiang Wu, Yanfen Zhai, et al. · AIAA AVIATION Forum · 1
Vertical etching of Al0.7Sc0.3N for next generation of acoustic wave resonators
2023 · Tamara Terzic, Nikolai Andrianov, et al. · 1
Soft mask-based dry etching of parylene AF4 for advanced packaging applications
2022 · Mohamed Lamine Faycal Bellaredj, Nikolai Andrianov, et al. · IEEE Electronics Packaging Technology Conference (EPTC) · 1
Sputtered aluminum nitride-on-insulator for scalable integrated photonics
2026 · Jasmin Spettel, Bernardo Realista-Ferreira, et al.
Atomic layer etching of sputter-deposited AlN thin films in radiofrequency Cl 2 –Ar plasmas
2026 · Iurii Nesterenko, Joaquín Miranda-Mena, et al. · Plasma Sources Science and Technology
Effect of methane-hydrogen gas admixture on the selectivity toward platinum in dry etching of lead zirconate titanate (PZT) thin films by inductively coupled plasma reactive ion etching
2026 · Madeleine Petschnigg, Nikolai Andrianov, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
Optimized low-frequency PECVD diamond-like carbon hard masks for high-selectivity thin-film lithium niobate etching
2026 · M. L. Savchenko, D. Solonenko, et al. · Journal of Applied Physics
Atomic Layer Etching of Aluminum Nitride: Mechanistic Insights from First-Principles Studies of Chlorine Chemistry
2025 · Nayak, Sanjay, Andrianov, Nikolai, et al. · arXiv (Cornell University)
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Low-Temperature Adhesive Wafer Bonding for Film Layer Transfer
2024 · Augusto Rodrigues, Nikolai Andrianov, et al. · Electronics System-Integration Technology Conference (ESTC)
Optical Ring Resonators in Sputtered Aluminum Nitride on Insulator for Integrated Photonic MEMS
2024 · Jasmin Spettel, Nikolai Andrianov, et al. · International Conference on Optical MEMS and Nanophotonics
Efficient Xe Filling of MEMS Vapor Cells Empowered by Customized Triple Stack Wafer Bond Processing
2023 · Ali Roshanghias, Jaroslaw Kaczynski, et al. · ECS Meeting Abstracts
Efficient Xe Filling of MEMS Vapor Cells Empowered by Customized Triple Stack Wafer Bond Processing
2023 · Ali Roshanghias, Jaroslaw Kaczynski, et al. · ECS Transactions
Non-destructive Na content analysis in bonded silicon-glass microcavities using laser-induced breakdown spectroscopy
2023 · Tibor Bereczki, Yucheng Zhang, et al.
Dual-Frequency Piezoelectric Micromachined Ultrasonic Transducers for Fundamental and Harmonic Imaging
2023 · Yanfen Zhai, Waleed Maqsood, et al. · Proceedings, IEEE micro electro mechanical systems
Works count: 31
Citation count: 63
H-index: 5
I10-index: 1
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