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Ashten Fralick
Institution:
Georgia Institute of Technology
Observed institution:
Georgia Institute of Technology
OpenAlex ID:
A5042941702
Base developable negative tone molecular resist based on epoxide cross-linking
2015
·
Brandon Sharp
, Richard A. Lawson
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
6
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