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Richard Moerman

Observed names: Moerman, R, Moerman, R., R. Moerman
Institution: ASML (Netherlands)
OpenAlex ID: A5043593579
Nucleation and growth of PrBa2Cu3O7−δ barrier layers on ramps in DyBa2Cu3O7−δ studied by atomic force microscopy
1996 · M. A. J. Verhoeven, R. Moerman, et al. · Applied Physics Letters · 24
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Immersion specific defect mechanisms: findings and recommendations for their control
2006 · Michael Kocsis, Dieter Van Den Heuvel, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 17
Intra-wafer CDU characterization to determine process and focus contributions based on scatterometry metrology
2004 · Mircea Dusa, Richard Moerman, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 12
Material aspects for preparing HTS quasiparticle injection devices
1997 · C.W. Schneider, R. Moerman, et al. · IEEE Transactions on Applied Superconductivity · 12
Characterization of ArF immersion process for production
2005 · Jeng-Horng Chen, Li-Jui Chen, et al. · Optical Microlithography XVIII · 10
Surface roughness and height-height correlations dependence on thickness of YBaCuO thin films
1997 · D.H.A. Blank, M.E. Bijlsma, et al. · Journal of Alloys and Compounds · 10
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Extending single-exposure patterning towards 38-nm half-pitch using 1.35 NA immersion
2009 · Igor Bouchoms, Andre Engelen, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 9
A dive into clear water: immersion defect capabilities
2006 · B. Streefkerk, J. Mulkens, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 9
HTS quasiparticle injection devices with large current gain at 77 K
1999 · C.W. Schneider, R. Moerman, et al. · IEEE Transactions on Applied Superconductivity · 7
Coexistence of grains with differing orthorhombicity in high quality YBa2Cu3O7−δ thin films
1994 · E. I. de Obaldia, K. F. Ludwig, et al. · Applied Physics Letters · 7
Tunnelling barriers for high temperature superconductor devices
1997 · G.J. Gerritsma, M.A.J. Verhoeven, et al. · Journal of Alloys and Compounds · 6
Magnetic flux pinning in epitaxial YBa2Cu3O7−δ thin films
1995 · Alexana Roshko, Loren F. Goodrich, et al. · Journal of Electronic Materials · 6
System qualification and optimization for imaging performance on the 0.80-NA 248-nm step-and-scan systems
2002 · Koen van Ingen Schenau, Hans Bakker, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 5
Production aspects of 45nm immersion lithography defect monitoring using laser DUV inspection methodology
2008 · Remo Kirsch, Antje Martin, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3
Defectivity reduction by optimization of 193-nm immersion lithography using an interfaced exposure-track system
2006 · Michael Carcasi, Shinichi Hatakeyama, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3
Immersion lithography exposure systems: today's capabilities and tomorrow’s expectations
2005 · Jan Mulkens, Bob Streefkerk, et al. · Optical Microlithography XVIII · 3
Can DUV take us below 100 nm?
2001 · Jo Finders, Louis Jorritsma, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3
Introduction of ramp-type technology in HTS quasiparticle injection devices
1999 · R. Moerman, D. Veldhuis, et al. · IEEE Transactions on Applied Superconductivity · 3
AFM studies of surface morphologies of sputtered SrTiO 3 films and annealed MgO substrates
1999 · Q. Meng, R. Moerman, et al. · Applied Physics A · 2
Recent progress in developing HTS quasi-particle injection devices
1997 · Schneider, C.W., Schneider, R., et al. · University of Twente Research Information · 1
Initial process evaluation for next generation immersion technology node
2007 · Tadatoshi Tomita, Kathleen Nafus, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
Sputtered STO, PBCO and DBCO thin films on MgO and STO substrates
1997 · Qingzhou Meng, R. Moerman, et al. · University of Twente Research Information
Ramp-type Josephson junctions with PrBa2Cu3-xGaxO7 barriers
1996 · G.J. Gerritsma, M.A.J. Verhoeven, et al. · University of Twente Research Information
Materials properties and preparation of HTS current injection transistors
1996 · C. Schneider, R. Moerman, et al. · University of Twente Research Information
Tunneling Phenomena in HTS Josephson Junctions with PBCGO barriers
1996 · G.J. Gerritsma, M.A.J. Verhoeven, et al. · University of Twente Research Information
Works count: 32
Citation count: 152
H-index: 8
I10-index: 6
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