Author

O. Arroyo

Institution: Tecnalia
Observed institution: Tecnalia
OpenAlex ID: A5075950441
2005 · B. Bilenberg, M. Hansen, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 48
Works count: 1
Citation count: 48
H-index: 1
I10-index: 1
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