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O. Arroyo
Institution:
Tecnalia
Observed institution:
Tecnalia
OpenAlex ID:
A5075950441
Topas-based lab-on-a-chip microsystems fabricated by thermal nanoimprint lithography
2005
·
B. Bilenberg
, M. Hansen
, et al.
·
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
·
48
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Citation count:
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