Work

Topas-based lab-on-a-chip microsystems fabricated by thermal nanoimprint lithography

Year: 2005

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.2091089

Authors: B. Bilenberg, M. Hansen, D. Johansen, V. Özkapici, C. Jeppesen, P. Szabo, I. M. Obieta, O. Arroyo, J. O. Tegenfeldt, A. Kristensen

Institutions: Technical University of Denmark, Tecnalia, Lund University

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2081963752

FWCI: 2.404

Cites: 14

Cited by: 48

Related to: 10