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A O Isakov
Institution:
Troitsk Institute for Innovation and Fusion Research
Observed institution:
Troitsk Institute for Innovation and Fusion Research
OpenAlex ID:
A5076345792
Cleaning substrates and subsequent deposition of coatings with coaxial magnetron discharge
2021
·
M R Kalandiia
, V N Trofimov
, et al.
·
Journal of Physics Conference Series
·
1
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