Year: 2021
Type: conference-paper
Abstract: The created experimental magnetron sputtering system allows preliminary cleaning of the substrate surface and subsequent deposition of coatings on long cylindrical products within a single system using a coaxial magnetron discharge at a working gas pressure of 150 mTorr. The coating discharge has reverse electrodes polarity relative to the cleaning discharge. A theoretical calculation of the discharge parameters has been carried out.
Authors: M R Kalandiia, V N Trofimov, A A Yakushkin, A V Sokolov, A O Isakov
Institution: Troitsk Institute for Innovation and Fusion Research
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: diamond
OpenAlex ID: W3176184789