Author

Walter Starflinger

Institution: Infineon Technologies (Germany)

Observed institution: Infineon Technologies (Germany)

OpenAlex ID: A5078282349

New Single Wafer Double Sided Spin Cleaning Method

2001 · Walter Starflinger, Reinhard Sellmer, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2

Works count: 1

Citation count: 2

H-index: 1

I10-index: