Product
Help
Pricing
About
Jobs
Log in
Get started
Author
Add to collection
Bong Ha Shin
Institution:
Kumho Petrochemical (South Korea)
Observed institution:
Kumho Petrochemical (South Korea)
OpenAlex ID:
A5079114366
The factors affecting improvement sensitivity, CDU, and resolution in EUV resist
2014
·
Joonhee Han
, Hyun Soon Lim
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
2
Show more works
View as search
Works count:
1
Citation count:
2
H-index:
1
I10-index:
Year
Topic
Type
