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Alex H. Buxbaum

Compound formation at the interaction of Pd with strained layers of Si1−xGex epitaxially grown on Si(100)
1991 · A. Buxbaum, M. Eizenberg, et al. · Applied Physics Letters · 44
Three-dimensional chemical imaging of embedded nanoparticles using atom probe tomography
2012 · Satyanarayana V N T Kuchibhatla, V Shutthanandan, et al. · Nanotechnology · 24
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Epitaxial growth of single-crystal Si1−xGex on Si(100) by ion beam sputter deposition
1990 · F. Meyer, C. Schwebel, et al. · Thin Solid Films · 23
Strain relaxation in epitaxial Si1−xGex/Si(100) layers induced by reaction with palladium
1992 · A. Buxbaum, E. Zolotoyabko, et al. · Thin Solid Films · 16
Interaction of Pd with Strained Layers of Si1-xGex Epitaxially Grown on Si(100)
1991 · A. Buxbaum, M. Eizenberg, et al. · Japanese Journal of Applied Physics · 16
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Post-bond sub-500 nm alignment in 300 mm integrated face-to-face wafer-to-wafer Cu-Cu thermocompression, Si-Si fusion and oxideoxide fusion bonding
2010 · W. H. Teh, C. Deeb, et al. · IEEE International D Systems Integration Conference · 11
3D analysis of high-aspect ratio features in 3D-NAND
2020 · Jens-Timo Neumann, Dmitry Klochkov, et al. · Metrology, Inspection, and Process Control XXXVI · 9
Recent advances in submicron alignment 300 mm copper-copper thermocompressive face-to-face wafer-to-wafer bonding and integrated infrared, high-speed FIB metrology
2010 · W.H. Teh, C. Deeb, et al. · IEEE International Interconnect Technology Conference (IITC) · 8
3D metrology solution for the 65-nm node
2004 · Rick Kneedler, Sergey Borodyansky, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 7
Endpoint solution for photomask chrome loads down to 0.25%
2002 · Melisa J. Buie, Brigitte C. Stoehr, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 7
Stress in Si1−xGex films prepared by ion sputtering: origin and relaxation
1992 · Y. Le Meur, F. Meyer, et al. · Thin Solid Films · 6
Applications of In-situ Sample Preparation and Modeling of SEM-STEM Imaging
2008 · R.J. Young, A. Buxbaum, et al. · Proceedings - International Symposium for Testing and Failure Analysis · 4
Backside TEM Sample Preparation With The Multi-Loader Flip-Stage
2009 · A Buxbaum, R Schampers, et al. · Microscopy and Microanalysis · 3
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Phase standard based on profilometer metrology standard
2004 · Gregory P. Hughes, Cindy Goodman, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3
Compound Formation in Pd Metallized Strained Layers of Sige on Si
1991 · A. Buxbaum, M. Eizenberg, et al. · MRS Proceedings · 3
Sample Preparation and Analysis on Full-Thickness Silicon Wafers for Wafer-to-Wafer Bonding Process Development
2010 · Richard J. Young, Alex Buxbaum, et al. · Proceedings - International Symposium for Testing and Failure Analysis · 2
Through-pitch characterization and printability for 65nm half-pitch alternating aperture phase shift applications
2005 · Vicky Philipsen, Leonardus Leunissen, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2
DUV ALTA system aerial image enhancement for improved pattern fidelity
2003 · Paul C. Allen, Alex H. Buxbaum, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2
Photoresist processing for high-resolution DUV lithography at 257 nm
2001 · Scott E. Fuller, Warren Montgomery, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2
Low-kV FIB Applications and Workflows for Advanced Circuit Edit
2023 · Rongjin Yan, Majid Vaghayenegar, et al. · Proceedings - International Symposium for Testing and Failure Analysis · 1
Application of 3D EBSD to a Two-Phase, Ultra-Fine Grain Titanium Alloy
2011 · A Buxbaum, S Sitzman, et al. · Microscopy and Microanalysis · 1
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Recent Developments in TEM Applications for the IC Industry
2008 · L. F. Fu, Y. C. Wang, et al. · Proceedings - International Symposium for Testing and Failure Analysis · 1
In-Situ Sample Preparation and Modeling of SEM-STEM Imaging
2008 · RJ Young, A Buxbaum, et al. · Microscopy and Microanalysis · 1
Integration and optimization of the DUV ALTA pattern generation system using a CAR process with the Tetra photomask etch system
2003 · Alex H. Buxbaum, Scott E. Fuller, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1
Performance of the ALTA 3500 scanned-laser mask lithography system
1998 · Peter D. Buck, Alex H. Buxbaum, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1
Works count: 34
Citation count: 198
H-index: 8
I10-index: 6
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