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R. Cirelli

Observed names: R. A. Cirelli, R.A. Cirelli, Ray A. Cirelli, Ray Cirelli
OpenAlex ID: A5081065130
Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks
2004 · Seokwoo Jeon, Jang-Ung Park, et al. · Proceedings of the National Academy of Sciences · 303
Optical transmission through double-layer metallic subwavelength slit arrays
2006 · H. B. Chan, Z. Marcet, et al. · Optics Letters · 95
1296-port MEMS transparent optical crossconnect with 2.07 petabit/s switch capacity
2002 · R. Ryf, J. Kim, et al. · Optical Fiber Communication Conference · 85
Superhydrophobic membranes with electrically controllable permeability and their application to “smart” microbatteries
2008 · V. A. Lifton, J. A. Taylor, et al. · Applied Physics Letters · 37
Monolithic fringe-field-activated crystalline silicon tilting-mirror devices
2003 · D.S. Greywall, Chien-Shing Pai, et al. · Journal of Microelectromechanical Systems · 30
MEMS thermal imager with optical readout
2009 · C.D.W. Jones, C.A. Bolle, et al. · Sensors and Actuators A Physical · 27
Spatial light modulator for maskless optical projection lithography
2006 · G. P. Watson, V. Aksyuk, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 26
Monolithic MEMS optical switch with amplified out-of-plane angular motion
2003 · D. Lopez, M.E. Simon, et al. · IEEE/LEOS International Conference on Optical MEMS · 24
Controlling the phase delay of light transmitted through double-layer metallic subwavelength slit arrays
2008 · Z. Marcet, J. W. Paster, et al. · Optics Letters · 19
193 nm single layer resist strategies, concepts, and recent results
1998 · O. Nalamasu, F. M. Houlihan, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 19
Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators
2007 · Flavio Pardo, R.A. Cirelli, et al. · Microelectronic Engineering · 18
Optical transmission through double-layer, laterally shifted metallic subwavelength hole arrays
2010 · Z. Marcet, Z. H. Hang, et al. · Optics Letters · 17
Rapid thermal processing of silicon wafers with emissivity patterns
2006 · M. Rabus, A. T. Fiory, et al. · Journal of Electronic Materials · 17
A Commercially Viable 193 nm Single Layer Resist Platform.
1997 · F.M. Houlihan, T. Wallow, et al. · Journal of Photopolymer Science and Technology · 17
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High-Density Solder Bump Interconnect for MEMS Hybrid Integration
2007 · N. Basavanhally, D. Lopez, et al. · IEEE Transactions on Advanced Packaging · 15
Resist design concepts for 193 nm lithography: Opportunities for innovation and invention
1997 · E. Reichmanis, O. Nalamasu, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 15
Scalable wavelength-selective crossconnect switch based on MEMS and planar waveguides
2005 · R. Ryf, P. Bernasconi, et al. · European Conference on Optical Communication · 14
Characterization of Piston-Tip-Tilt mirror pixels for scalable SLM arrays
2006 · F. Pardo, M.E. Simon, et al. · IEEE/LEOS International Conference on Optical MEMS · 13
Transmission enhancement in an array of subwavelength slits in aluminum due to surface plasmon resonances
2005 · Ho Bun Chan, Zsolt Marcet, et al. · Bell Labs Technical Journal · 13
Two-dimensional MEMS array for maskless lithography and wavefront modulation
2007 · D. López, V. A. Aksyuk, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 12
Modeling influence of structural changes in photoacid generators on 193 nm single layer resist imaging
2000 · Ebo Croffie, Lei Yuan, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 12
A half wave retarder made of bilayer subwavelength metallic apertures
2011 · Z. Marcet, H. B. Chan, et al. · Applied Physics Letters · 10
Comparison of tilting and piston mirror elements for 65nm node spatial light modulator optical maskless lithography
2004 · G. P. Watson, V. Aksyuk, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 10
Multi-service optical node based on low-loss MEMS optical crossconnect switch
2002 · R. Ryf, D.T. Neilson, et al. · Optical Fiber Communication Conference · 10
Sub-0.1 μm NMOS transistors fabricated using laser-plasma point-source X-ray lithography
1995 · C.E. Rittenhouse, W.M. Mansfield, et al. · IEEE Electron Device Letters · 10
Works count: 46
Citation count: 911
H-index: 15
I10-index: 25
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