Work

Comparison of tilting and piston mirror elements for 65nm node spatial light modulator optical maskless lithography

Year: 2004

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.1824063

Authors: G. P. Watson, V. Aksyuk, D. M. Tennant, R. A. Cirelli

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2016506884

FWCI: 2.604

Cites: 6

Cited by: 10

Related to: 10