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Pierre Sixt

One-step 3D shaping using a gray-tone mask for optical and microelectronic applications
1994 · Y. Oppliger, P. Sixt, et al. · Microelectronic Engineering · 121
Enabling technologies for 3D chip stacking
2008 · Patrick Leduc, Lea Di Cioccio, et al. · International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA) · 49
Minimization of phase errors in long fiber Bragg grating phase masks made using electron beam lithography
1996 · J. Albert, S. Theriault, et al. · IEEE Photonics Technology Letters · 47
Replicated chirped waveguide gratings for optical sensing applications
1995 · R.E. Kunz, J. Edlinger, et al. · Sensors and Actuators A Physical · 42
Passive fiber Fabry-Perot filter for intensity-modulated sensors referencing
1986 · P. Sixt, G. Kotrotsios, et al. · Journal of Lightwave Technology · 15
Sensitivity optimization of a grating coupled evanescent wave immunosensor
1995 · O. Parriaux, P. Sixt · Sensors and Actuators B Chemical · 13
Segmented subwavelength silicon gratings manufactured by high productivity microelectronic technologies for linear to radial/azimuthal polarization conversion
2014 · Thomas Kämpfe, Pierre Sixt, et al. · Optical Engineering · 12
Impact of lithography variability on statistical timing behavior
2004 · Christopher J. Progler, Amir Borna, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 11
Performance of interferometric rotation encoders using diffraction gratings
1997 · Guy Voirin, Ulrich Benner, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 9
Patterning Strategy for Monoelectronic Device Platform in a Complementary Metal Oxide Semiconductor Technology
2011 · Sebastien Pauliac-Vaujour, Romain Wacquez, et al. · Japanese Journal of Applied Physics · 7
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Die-to-die alignment for lithographic processing of reconstructed wafers
2022 · Mikhail Loktev, Sylvain I. Misat, et al. · Smart Systems Integration Conference and Exhibition (SSI) · 5
Spatial-frequency bandwidth in the photolithographic transfer of submicron gratings
1995 · Olivier M. Parriaux, Henry Vuilliomenet, et al. · Optical Engineering · 4
Microstructure Fiber-Tip Sensor With Spectral Encoding
1989 · P. Sixt, L. Falco, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 4
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Overlay Diagnostics of Die-to-die Alignment on the Kulicke and Soffa LITEQ 500 Stepper
2022 · Sylvain Misat, Mikhail Loktev, et al. · IEEE Electronics Packaging Technology Conference (EPTC) · 3
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Digitized dual-frequency coupling grating for waveguide displacement interferometry
2005 · G. Voirin, P. Sixt, et al. · Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) · 3
Experimental study of digitalized dual-frequency coupling gratings
1996 · Yan Li, Mai Xu, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2
Optimized design and manufacturing process of diffuse micro corner cubes for head-up projection display applications
2023 · Christophe Martinez, Jean-Marie Quemper, et al. · Advances in Display Technologies · 1
Linear to radial/azimuthal polarization converter in transmission using form birefringence in a segmented silicon grating manufactured by high productivity microelectronic technologies
2014 · T. Kaempfe, P. Sixt, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1
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Evaluation of transparent etch stop layer phase shift mask patterning and comparison with the single trench undercut approach
2005 · Y. Rody, P. Martin, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1
Production data from a Leica ZBA31H+ shaped e-beam mask writer located at the Photronics facility, Manchester, England
1999 · Stephen Johnson, Dominic Loughran, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1
Fabrication of Ultra-Scaled Back-End TiN Contacts in Silicon-Rich Oxide for High Density Memory Applications.
2025 · Charpin, Christelle, Navarro, Gabriele, et al. · HAL
Smallest aspect-ratio form-birefringence half-wave plate
2013 · Kampfe, Thomas, Sixt, Pierre, et al. · HAL
Manufacturability and printability of AAPSM with transparent etch stop layer
2006 · Michael Cangemi, Vicky Philipsen, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
Optical properties and process impacts of high transmission EAPSM
2006 · Young Mog Ham, Nicolo Morgana, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
A films-based approach to intensity imbalance correction for 65nm node c:PSM
2005 · Rand Cottle, Pierre Sixt, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
Works count: 29
Citation count: 351
H-index: 9
I10-index: 8
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