Author

C. M. Camalleri

Observed names: C M Camalleri, C.M. Camalleri, Cateno Marco Camalleri

Institution: STMicroelectronics (Italy)

Observed institution: STMicroelectronics (Italy)

OpenAlex ID: A5083408701

A hybrid approach to nanoelectronics

2005 · G F Cerofolini, G Arena, et al. · Nanotechnology · 38

PDF

Efficiency and thermal stability of Pt gettering in crystalline Si

1996 · A. Cacciato, C. M. Camalleri, et al. · Journal of Applied Physics · 20

Integration of Melting Excimer Laser Annealing in Power MOS Technology

2007 · Vittorio Privitera, Antonino La Magna, et al. · IEEE Transactions on Electron Devices · 17

Kinetics and thermodynamics constraints in Pt gettering by P diffusion in Si

1996 · S. Coffa, G. Franco, et al. · Journal of Applied Physics · 7

Surface photovoltage measurements for Cu, Ti and W determination in Si wafers

2001 · D. Cali, C.M. Camalleri, et al. · Materials Science in Semiconductor Processing · 1

Effects of cleaning and postoxidation annealing on thin oxides

1997 · G. Franco, C. M. Camalleri, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1

Surface and interface roughness after thermal oxidation of As, B and Si implanted silicon wafers

2002 · V. Raineri, F. Iacona, et al. · International Conference on Ion Implantation Technology

Works count: 7

Citation count: 84

H-index: 4

I10-index: 3