Work

Integration of Melting Excimer Laser Annealing in Power MOS Technology

Year: 2007

Type: article

Source: IEEE Transactions on Electron Devices

DOI: 10.1109/ted.2007.892011

Authors: Vittorio Privitera, Antonino La Magna, Corrado Spinella, Guglielmo Fortunato, Luigi Mariucci, M. Cuscuna, Cateno Marco Camalleri, Angelo Magri, Giovanna La Rosa, Bengt G. Svensson, Eduard V. Monakhov, Frank Simon

Institutions: National Research Council, Institute for Microelectronics and Microsystems, STMicroelectronics (Italy), University of Oslo, Coherent (Germany)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Università degli Studi di Palermo

OpenAlex ID: W1966236361

FWCI: 2.081

Cites: 17

Cited by: 17

Related to: 10