Author

and P. E. Russell

Institution: North Carolina State University

Observed institution: North Carolina State University

OpenAlex ID: A5110111188

Silicon structures for in situ characterization of atomic force microscope probe geometry

1996 · K. F. Jarausch, T. J. Stark, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 20

Works count: 1

Citation count: 20

H-index: 1

I10-index: 1