Work

Silicon structures for in situ characterization of atomic force microscope probe geometry

Year: 1996

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.588774

Authors: K. F. Jarausch, T. J. Stark, and P. E. Russell

Institution: North Carolina State University

Language: English

Topic: Force Microscopy Techniques and Applications

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2057768076

FWCI: 0.883

Cites:

Cited by: 20

Related to: 10