Author

Frederick Raymond

Observed names: F. Raymond, Frederick Raymond Frederick Raymond, Frederick Raymond III, Frederick Raymond Iii

Observed institution: Applied Materials (United States)

OpenAlex ID: A5110141291

Feasibility study of new graybeam writing strategies for raster scan mask generation

1993 · Andrew Murray, Frank Abboud, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 14

100-nm OPC mask patterning using raster-scan 50-kV pattern generation technology

2002 · Frank E. Abboud, Ki-Ho Baik, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 7

Lithographic performance results for a new 50-kV electron-beam mask writer

2001 · Varoujan Chakarian, Stephen R. Bylciw, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 7

Electron Beam Column Developments for Submicron- and Nanolithography

1993 · Mark Gesley, Frank Abboud, et al. · Japanese Journal of Applied Physics · 7

Evaluation of OPC mask printing with a raster scan pattern generator

2002 · Thomas H. Newman, Jan M. Chabala, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 6

Design considerations for an electron-beam pattern generator for the 130-nm generation of masks

1999 · Frank E. Abboud, Sergey V. Babin, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 6

Dynamic corrections in MEBES 4500

1994 · Henry Pearce-Percy, Richard Prior, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 6

Electrodynamics of fast beam blankers

1993 · M. Gesley, D. Colby, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 6

Multipass gray printing for the new MEBES 4500S mask lithography system

1997 · Frank E. Abboud, Robert L. Dean, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 5

Raster scan patterning solution for 100- and 70-nm OPC masks

2002 · Frank E. Abboud, Ki-Ho Baik, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 4

Initial benchmarking of a new electron-beam raster pattern generator for 130-100 nm maskmaking

2000 · Charles A. Sauer, Frank E. Abboud, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3

Lithographic analysis of multipass gray writing strategy for electron-beam pattern generation

1999 · Jan M. Chabala, Frank E. Abboud, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3

Address data reduction and lithography performance of graybeam writing strategies for raster scan mask generation

1994 · Andrew Muray, Frank Abboud, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 3

Elements of an advanced pattern generator for 130- to 100-nm maskmaking

2000 · Varoujan Chakarian, Charles A. Sauer, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2

System architecture choices for an advanced mask writer (100 to 130 nm)

1999 · Varoujan Chakarian, Frederick Raymond III, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2

Evaluation of the MEBES 4500 reticle writer to commercial requirements of 250-nm design rule IC devices

1996 · Frank E. Abboud, David W. Alexander, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2

MEBES 4000 optimization and characterization of MEBES 4500

1994 · Jim DeWitt, J. Millino, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2

Works count: 18

Citation count: 85

H-index: 6

I10-index: 1