Author

Lynn R. Allen

Observed names: L. R. Allen, L.R. Allen, LynnR. Allen

Institutions: Sharp Laboratories of Europe (United Kingdom), Cambridge Microelectronics (United Kingdom), Micro Photon Devices, Camurus AB (Sweden)

Observed institutions: University of Washington, Sharp Laboratories of Europe (United Kingdom), Cambridge Microelectronics (United Kingdom), Micro Photon Devices, Camurus AB (Sweden), University of Missouri

OpenAlex ID: A5110166758

Observation of surface roughening on Ni(115)

1986 · Edward H. Conrad, Ralph M. Aten, et al. · The Journal of Chemical Physics · 102

Kosterlitz-Thouless roughening at the Ni(113) surface

1987 · Edward H. Conrad, Lynn R. Allen, et al. · Surface Science · 60

Erratum: Observations of surface roughening on Ni(115) [J. Chem. Phys. 8 4 , 1015 (1986)]

1986 · Edward H. Conrad, Ralph M. Aten, et al. · The Journal of Chemical Physics · 41

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Deposition of AlN at lower temperatures by atmospheric metalorganic chemical vapor deposition using dimethylethylamine alane and ammonia

1995 · J. N. Kidder, J. S. Kuo, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 33

Debye–Waller effects in helium diffraction from Ni(115)

1985 · E. H. Conrad, D. S. Kaufman, et al. · The Journal of Chemical Physics · 22

On the dependence of energy exchange and corrugation in atom-surface scattering: Argon scattering from Ni(115)

1987 · Ralph M. Aten, David Blanchard, et al. · Surface Science · 18

Effects of inelastic scattering on He diffraction lineshapes

1987 · Edward H. conrd, Lynn R. Allen, et al. · Surface Science · 17

Energy resolved measurements of the diffuse scattering near the roughening transition of Ni(113)

1988 · E.H. Conrad, L.R. Allen, et al. · Surface Science · 14

Tapered aluminum interconnect etch

1994 · Lynn R. Allen, Rick Rickard · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 6

A helium diffraction study of the structure of the Ni(115) surface

1987 · Donald S. Kaufman, Ralph M. Aten, et al. · The Journal of Chemical Physics · 6

Adsorption of H2 on Ni(115): A helium diffraction study

1986 · Donald S. Kaufman, Lynn R. Allen, et al. · Surface Science · 6

Effect of fluorine concentration on the etch characteristics of fluorinated tetraethylorthosilicate films

1996 · Lynn R. Allen · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 4

Tungsten plug etchback and substrate damage measured by atomic force microscopy

1995 · Lynn R. Allen, John M. Grant · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2

Manufacturing issues in copper chemical vapor deposition processes

1994 · Tue Nguyen, Lynn R. Allen, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2

A novel damascene process for one mask via/interconnect formation

2002 · Tue Nguyen, B.D. Ulrich, et al. · Symposium on VLSI Technology · 1

Selective dry etching of oxide films for spacer applications in a high density plasma

1996 · Lynn R. Allen, Victoria Yu-Wang, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1

Kosterlitz-Thouless roughening at the Ni(113) surface

1987 · Edward H. Conrad, Lynn R. Allen, et al. · Surface Science Letters · 1

On the dependence of energy exchange and corrugation in atom-surface scattering: argon scattering from Ni(115)

1987 · RalphM. Aten, David Blanchard, et al. · Surface Science Letters · 1

Selective Deposition of Silicon and Silicon-Germanium Alloys by Rapid Thermal Chemical Vapor Deposition

1996 · John M. Grant, Ming Ang, et al. · MRS Proceedings

Monitoring of highly selective plasma etch processes

1994 · Jer-Shen Maa, Lynn R. Allen, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Characterization of rapid thermally grown dielectrics by surface charge analysis and atomic force microscopy

1994 · John M. Grant, Lynn R. Allen · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Roughening on (11m) Metal Surfaces

1988 · E. H. Conrad, L. R. Allen, et al. · Springer series in surface sciences