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Rachel Owens
Observed institution:
Massachusetts Institute of Technology
ORCID:
0009-0008-2652-8520
Observed ORCID:
0009-0008-2652-8520
OpenAlex ID:
A5111222036
Dynamic Time Warping Constraints for Semiconductor Processing
2024
·
Rachel Owens
, Fan-Keng Sun
, et al.
·
ASMC proceedings
·
2
PDF
Spatio-temporal Forecasting of Plasma Etch Profiles via Physics-informed Deep Learning
2026
·
Chih-Yu (Andrew) Lai
, Jinwoo Park
, et al.
·
SSRN Electronic Journal
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Works count:
2
Citation count:
2
H-index:
1
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