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Chyan-Chyi Wu
Institution:
Industrial Technology Research Institute
Observed institution:
Industrial Technology Research Institute
OpenAlex ID:
A5111618241
A nanowire WO3 humidity sensor integrated with micro-heater and inverting amplifier circuit on chip manufactured using CMOS-MEMS technique
2006
·
Ching-Liang Dai
, Mao-Chen Liu
, et al.
·
Sensors and Actuators B Chemical
·
94
Optical heterodyne grating interferometry for displacement measurement with subnanometric resolution
2007
·
Ju-Yi Lee
, Hui-Yi Chen
, et al.
·
Sensors and Actuators A Physical
·
87
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Works count:
2
Citation count:
181
H-index:
2
I10-index:
2
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