Work

Optical heterodyne grating interferometry for displacement measurement with subnanometric resolution

Year: 2007

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/j.sna.2007.02.017

Authors: Ju-Yi Lee, Hui-Yi Chen, Cheng-Chih Hsu, Chyan-Chyi Wu

Institutions: National Central University, Industrial Technology Research Institute

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Council, Industrial Technology Research Institute

OpenAlex ID: W2000791119

FWCI: 3.028

Cites: 19

Cited by: 87

Related to: 10