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Kohji Shinmura
Institution:
The University of Osaka
Observed institution:
The University of Osaka
OpenAlex ID:
A5111645906
Molecular layer etching of GaAs
1992
·
Yoshinobu Aoyagi
, Kohji Shinmura
, et al.
·
Applied Physics Letters
·
61
Atomic layer manipulation of III–V compounds
1993
·
Yoshinobu Aoyagi
, Kohji Shinmura
, et al.
·
Thin Solid Films
·
15
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Works count:
2
Citation count:
76
H-index:
2
I10-index:
2
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