Molecular layer etching of GaAs
Year: 1992
Type: article
Source: Applied Physics Letters
DOI: 10.1063/1.106477
Authors: Yoshinobu Aoyagi, Kohji Shinmura, Kiyoshi Kawasaki, Tomoko Tanaka, Kenji Gamo, Susumu Namba, Ichirou Nakamoto
Institutions: RIKEN, The University of Osaka, IHI Corporation (Japan)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2019804329