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W.H. Morris
Observed name:
Wes Morris
Institution:
Silicon Labs (United States)
Observed institution:
Silicon Labs (United States)
OpenAlex ID:
A5111665334
Evaluation of high dose, high energy boron implantation into Cz substrates for epi-replacement in CMOS technology
2001
·
K.K. Bourdelle
, Yuanning Chen
, et al.
·
IEEE Transactions on Electron Devices
·
12
Material processing and advanced well structures using high-energy implantation for EPI replacement
1995
·
Dirk Wristers
, Chris Eiting
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
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Works count:
2
Citation count:
12
H-index:
1
I10-index:
1
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