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Dmitriev Vladimir
Institution:
Carl Zeiss (Israel)
Observed institution:
Carl Zeiss (Israel)
OpenAlex ID:
A5111685629
RegC: a new registration control process for photomasks after pattern generation
2011
·
Erez Graitzer
, Guy Ben-Zvi
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
7
Correcting image placement errors using registration control (RegC®) technology in the photomask periphery
2012
·
Avi Cohen
, Falk Lange
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
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Works count:
2
Citation count:
7
H-index:
1
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