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G. T. Huang

Observed name: GT Huang
OpenAlex ID: A5111765737
Improving on-product performance at litho using integrated diffraction-based metrology and computationally designed device-like targets fit for advanced technologies (incl. FinFET)
2014 · Kai-Hsiung Chen, GT Huang, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 22
A paradigm shift in scatterometry-based metrology solution addressing the most stringent needs of today as well as future lithography
2010 · C. M. Ke, Victor Shih, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 7
A sophisticated metrology solution for advanced lithography: addressing the most stringent needs of today as well as future lithography
2009 · Victor Shih, Jacky Huang, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 5
Works count: 3
Citation count: 34
H-index: 3
I10-index: 1
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