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Author

Haruki Enomoto

Observed name: Enomoto, Haruki
Observed institution: Tokyo Institute of Technology
OpenAlex ID: A5111794907
Loss Reduction of Si Wire Waveguide Fabricated by Edge-Enhancement Writing for Electron Beam Lithography and Reactive Ion Etching Using Double Layered Resist Mask with C60
2009 · Keita Inoue, Dhanorm Plumwongrot, et al. · Japanese Journal of Applied Physics · 19
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Properties of high index-contrast wired GaInAsP waveguides with benzocyclobutene on Si substrate
2009 · Haruki Enomoto, Keita Inoue, et al. · Conference proceedings. ... International Conference on Indium Phosphide and Related Materials · 2
Si/III-Vハイブリッド光デバイスと関連技術
2010 · 西山, 伸彦, Nishiyama, Nobuhiko, et al. · Institutional Repositories DataBase (IRDB)
Athermal wavelength property of Si-slot ring resonator embedded with benzocyclobutene
2009 · Yuki Atsumi, Nobuhiko Nishiyama, et al. · IEEE International Conference on Group IV Photonics (GFP)
Athermal Wavelength Property of Si-Slot Ring Resonator Embedded with Benzocyclobutene
2009 · 渥美, 裕樹, Atsumi, Yuuki, et al. · Institutional Repositories DataBase (IRDB)
Properties of High index-Contrast Wired GaInAsP Waveguides with Benzocyclobutene on Si Substrate
2009 · 榎本, 晴基, Enomoto, Haruki, et al. · Institutional Repositories DataBase (IRDB)
BCB埋め込みSiスロット導波路による波長フィルタの温度無依存化の検討
2009 · 渥美, 裕樹, Atsumi, Yuuki, et al. · Institutional Repositories DataBase (IRDB)
Si上BCB貼付型強光閉じ込めGaInAsP細線導波路の特性
2009 · 榎本, 晴基, Enomoto, Haruki, et al. · Institutional Repositories DataBase (IRDB)
Loss Reduction of SiWireWaveguide on SOI Substrate Prepared by Parallel Plate RIE using Double Layered Resist Mask with C60
2008 · 井上, 敬太, Inoue, Keita, et al. · Institutional Repositories DataBase (IRDB)
Comparison of wafer bonding methods of membrane GaInAsP wired waveguides on Si substrate
2008 · Haruki Enomoto, Hai.Duc. Nguyen, et al. · International Nano-Optoelectronics Workshop
Evaluation of Si wire waveguide fabricated by parallel plate RIE process using double layered EB resist containing C60
2008 · Keita Inoue, Nobuhiko Nishiyama, et al. · International Nano-Optoelectronics Workshop
フラーレン含有の二層構造の電子線レジストを用い、平行平板型反応性イオンエッチングで作製したシリコン細線導波路の評価
2008 · 井上, 敬太, Inoue, Keita, et al. · Institutional Repositories DataBase (IRDB)
Comparison of Wafer Bonding Methods of Membrane GaInAsP WiredWaveguides on Si Substrate
2008 · 榎本, 晴基, Enomoto, Haruki, et al. · Institutional Repositories DataBase (IRDB)
Evaluation of Si Wire Wa using Doub
2008 · Keita Inoue, Nobuhiko Nishiyam, et al.
Bonding Methods of Membrane GaInA Waveguides on Si Substrate
2008 · Haruki Enomoto
Works count: 18
Citation count: 21
H-index: 2
I10-index: 1
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