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Michaela Grosser
Observed names:
Grosser Michaela,
Grosser, Michaela 1981-,
M. Grosser
Institutions:
TU Wien,
Saarland University
Observed institutions:
TU Wien,
Saarland University
OpenAlex ID:
A5111973920
The impact of sputter conditions on the microstructure and on the resistivity of tantalum thin films
2008
·
M. Grosser
, U. Schmid
·
Thin Solid Films
·
49
The impact of substrate properties and thermal annealing on tantalum nitride thin films
2011
·
M. Grosser
, M. Münch
, et al.
·
Applied Surface Science
·
36
The impact of annealing temperature and time on the electrical performance of Ti/Pt thin films
2010
·
M. Grosser
, U. Schmid
·
Applied Surface Science
·
36
Study on microstructural, chemical and electrical properties of tantalum nitride thin films deposited by reactive direct current magnetron sputtering
2010
·
Michaela Grosser
, M. Münch
, et al.
·
Microsystem Technologies
·
21
Microstructure and mechanical properties of sputter deposited tantalum nitride thin films after high temperature loading
2017
·
Michaela Grosser
, Helmut Seidel
, et al.
·
Thin Solid Films
·
15
Electrical performance of Ti/Pt thin films on glass-ceramic substrates after high temperature loading
2009
·
U. Schmid
, M. Grosser
·
Applied Physics A
·
7
Electrical and mechanical characterization of low temperature co-fired ceramics for high temperature sensor applications
2009
·
C. Bienert
, A. Roosen
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
2
高温負荷後のスパッタ蒸着した窒化タンタル薄膜の微細構造と機械的性質【Powered by NICT】
2017
·
Grosser Michaela
, Seidel Helmut
, et al.
·
Thin Solid Films
Influence of back pressure and plasma power on grain size, phase composition and resistivity of tantalum thin films
2009
·
M. Grosser
, U. Schmid
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
Tantalum based multilayers for high temperature sensor applications
2008
·
M. Grosser
, M. Soldera
, et al.
·
Proceedings of IEEE Sensors/Proceedings of IEEE Sensors ...
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Works count:
11
Citation count:
166
H-index:
6
I10-index:
5
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