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Yuan Chi Pai
Observed institutions:
United Microelectronics (Taiwan),
United Microelectronics (United States)
OpenAlex ID:
A5111997895
Scatterometry or imaging overlay: a comparative study
2015
·
Simon C. C. Hsu
, Yuan Chi Pai
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
15
Techniques for improving overlay accuracy by using device correlated metrology targets as reference
2014
·
Wei Jhe Tzai
, Simon C. C. Hsu
, et al.
·
Journal of Micro/Nanopatterning Materials and Metrology
·
10
PDF
DCM: device correlated metrology for overlay measurements
2013
·
Charlie Chen
, George K. C. Huang
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
6
Innovative fast technique for overlay accuracy estimation using archer self calibration (ASC)
2014
·
Simon C. C. Hsu
, Charlie Chen
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
5
Innovative techniques for improving overlay accuracy by using DCM (device correlated metrology) targets as reference
2014
·
Wei-Jhe Tzai
, Simon C. C. Hsu
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
3
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Works count:
6
Citation count:
39
H-index:
4
I10-index:
2
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