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I S. Kim
Institution:
Samsung Electronics (South Korea)
Observed institution:
Samsung Electronics (South Korea)
OpenAlex ID:
A5113236176
High performance Cu/low-k interconnect strategy beyond 10nm logic technology
2015
·
R.-H. Kim
, B. H. Kim
, et al.
·
IEEE International Interconnect Technology Conference and IEEE Materials for Advanced Metallization Conference (IITC/MAM)
·
2
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