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Tomoya NISHI
Institution:
Ebara (Japan)
Observed institution:
Ebara (Japan)
OpenAlex ID:
A5113399155
Study on Direct Optical Observation Method of sub-100 nm Gold Particle Motion after Detaching from a Surface being Cleaned
2024
·
Panart KHAJORNRUNGRUANG
, Yu ARIMA
, et al.
·
The Proceedings of Conference of Kanto Branch
Study on particle removal by roll brush cleaning of semiconductor wafer
2023
·
Yuki YOKOTA
, Ayako YANO
, et al.
·
The Proceedings of Conference of Kanto Branch
Research on the Droplets Collision Behavior to Liquid Film Flow for Simulating of Wafer Cleaning
2022
·
Hiroki FUJISHIMA
, Ayako YANO
, et al.
·
The Proceedings of Conference of Kanto Branch
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3
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