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Author

Joerg Muchow

Observed institution: Robert Bosch (Germany)
OpenAlex ID: A5113523883
Monocrystalline Si membranes for pressure sensors fabricated by a novel surface micromachining process using porous silicon
2003 · Hans Artmann, Frank Schaefer, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 11
Influence of process variation on the functionality of a high-pressure sensor
2002 · Joerg Muchow, Andre Kretschmann, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 7
Simulation of nonideal behavior in integrated piezoresistive silicon pressure sensors
1999 · Stefan Finkbeiner, Jochen Franz, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 4
Works count: 3
Citation count: 22
H-index: 3
I10-index: 1
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