Work

Influence of process variation on the functionality of a high-pressure sensor

Year: 2002

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.462804

Authors: Joerg Muchow, Andre Kretschmann, Ralf Henn, Klaus Skrobanek, Stefan Finkbeiner, Hans R. Krauss

Institution: Robert Bosch (Germany)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1968236582

FWCI: 1.877

Cites:

Cited by: 7

Related to: 10