Author

Tzvetan Ivanov

Observed name: Ivanov, Tzvetan

Institution: Technische Universität Ilmenau

Observed institutions: University of Kassel, Wrocław University of Science and Technology, Technische Universität Ilmenau, Lawrence Berkeley National Laboratory, University of New Mexico, IMEC, EV Group (Austria), Fraunhofer Institute for Digital Media Technology, Molecular Foundry, University of California, Berkeley

OpenAlex ID: A5113605653

Components for high speed atomic force microscopy

2006 · Georg E. Fantner, Georg Schitter, et al. · Ultramicroscopy · 237

Neuromorphic acoustic sensing using an adaptive microelectromechanical cochlea with integrated feedback

2023 · Claudia Lenk, Philipp Hövel, et al. · Nature Electronics · 70

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Review Article: Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication

2017 · Ivo W. Rangelow, Tzvetan Ivanov, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 68

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Thermally driven microgripper as a tool for micro assembly

2006 · Katerina Ivanova, Tzvetan Ivanov, et al. · Microelectronic Engineering · 49

Pattern-generation and pattern-transfer for single-digit nano devices

2016 · Ivo W. Rangelow, Ahmad Ahmad, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 41

Scanning probes in nanostructure fabrication

2014 · Marcus Kaestner, Tzvetan Ivanov, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 37

Atomic force microscope integrated with a scanning electron microscope for correlative nanofabrication and microscopy

2018 · Ivo W. Rangelow, Marcus Kaestner, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 36

Large area fast-AFM scanning with active “Quattro” cantilever arrays

2016 · Ahmad Ahmad, Nikolay Nikolov, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 34

Advanced electric-field scanning probe lithography on molecular resist using active cantilever

2015 · Marcus Kaestner, Cemal Aydogan, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 34

Field emission from diamond nanotips for scanning probe lithography

2018 · Martin Hofmann, Claudia Lenk, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 33

Nanoprobe maskless lithography

2010 · Ivo W. Rangelow, Tzvetan Ivanov, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 31

Scanning probe lithography approach for beyond CMOS devices

2013 · Zahid Durrani, Mervyn Jones, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 25

Increased imaging speed and force sensitivity for bio-applications with small cantilevers using a conventional AFM setup

2012 · Michael Leitner, Georg E. Fantner, et al. · Micron · 25

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Six-axis AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nanolithography

2016 · Tihomir Angelov, Ahmad Ahmad, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 23

Multilayer redox-based HfOx/Al2O3/TiO2 memristive structures for neuromorphic computing

2022 · Seongae Park, Benjamin Spetzler, et al. · Scientific Reports · 21

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Fast atomic force microscopy with self-transduced, self-sensing cantilever

2015 · Ahmad Ahmad, Tzvetan Ivanov, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 21

Micromachined scanning proximal probes with integrated piezoresistive readout and bimetal actuator for high eigenmode operation

2010 · Mirosław Woszczyna, Paweł Zawierucha, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 21

Engineering Method for Tailoring Electrical Characteristics in TiN/TiOx/HfOx/Au Bi-Layer Oxide Memristive Devices

2021 · Seongae Park, Stefan Klett, et al. · Frontiers in Nanotechnology · 20

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0.1-nanometer resolution positioning stage for sub-10 nm scanning probe lithography

2013 · Nataliya Vorbringer-Doroshovets, Felix Balzer, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 19

Advanced electric-field scanning probe lithography on molecular resist using active cantilever

2015 · Marcus Kaestner, Cemal Aydogan, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 17

Experimental study of field emission from ultrasharp silicon, diamond, GaN, and tungsten tips in close proximity to the counter electrode

2018 · Claudia Lenk, Steve Lenk, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 16

Nanofabrication by field-emission scanning probe lithography and cryogenic plasma etching

2018 · Claudia Lenk, Martin Hofmann, et al. · Microelectronic Engineering · 16

Bio-inspired acoustic MEMS sensor with tunable resonance frequency

2025 · Vishal Gubbi, Tzvetan Ivanov, et al. · Sensors and Actuators A Physical · 15

Sensitivity Improvement to Active Piezoresistive AFM Probes Using Focused Ion Beam Processing

2019 · Piotr Kunicki, Tihomir Angelov, et al. · Sensors · 15

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Scanning probe-based high-accuracy overlay alignment concept for lithography applications

2016 · Valentyn Ishchuk, Elshad Guliyev, et al. · Applied Physics A · 15

Works count: 69

Citation count: 1,208

H-index: 19

I10-index: 37