Work

Micromachined scanning proximal probes with integrated piezoresistive readout and bimetal actuator for high eigenmode operation

Year: 2010

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/1.3518465

Authors: Mirosław Woszczyna, Paweł Zawierucha, Piotr Pałetko, Michał Zielony, Teodor Gotszalk, Yanko Sarov, Tzvetan Ivanov, Andreas Frank, Jens-Peter Zöllner, Ivo W. Rangelow

Institutions: Wrocław University of Science and Technology, Technische Universität Ilmenau

Language: English

Topic: Force Microscopy Techniques and Applications

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2073596963

FWCI: 0.69

Cites: 17

Cited by: 21

Related to: 10